ZEISS SF&G SURFCOM NEX
Profile Detection for Every Application
SURFCOM NEX Series
Full flexibility for your application
The contour and surface measuring machines from ZEISS offer different, sometimes combinable sensors for roughness measurements, contour measurements or both.
SURFCOM NEX Series
Features
Future-proof flexibility
- With two different sizes of granite measuring table and three different sizes of columns to choose from, ZEISS offers a wide range of solutions for various applications.
- Future-proof thanks to multi-sensor capability with optical and tactile sensors.
- All tactile styli are exchangeable without tools or screws.
Furniture solutions
Different furniture choices complete the SURFCOM NEX Series:
- Space-saving DX variation suitable for production
- Solid, attractively-priced FX version with integrated active vibration damping or comprehensive SD desk furniture
Optional features
- The optional CNC kit, consisting of linear and rotary positioning axis, allows higher productivity due to fully automatic measurements.
- Optional topography measurements (optical or contact)
Patented magnetic linear drive for higher efficiency
The patented contact-free magnetic linear drive makes SURFCOM NEX highly efficient and low-maintenance. It enables a positioning speed that is up to seven times faster.
Options
The SURFCOM NEX series offers wide range of solutions. In this way we provide the best solution for your application.
SURFCOM NEX 001
- Best-in-class residual noise (Rz 0) thanks to a low-vibration linear drive
- Resolution of up to 0.1 nm at a 6.4 µm range and 20 nm at a 1,000 µm range
- With the optional tracing driver tilting unit it is possible to manually tilt the tracing driver +/-5 degrees
SURFCOM NEX 030
- Efficient contour measurements with collision protection as a standard feature
- Standard styli up to 529 mm – for measurements on deep features
- With the optional tracing driver tilting unit it is possible to manually tilt the tracing driver +/-15 degrees
SURFCOM NEX 040
- High-precision contour measuring station
- CNC measuring station with increased accuracy and automated probing force configuration
- Standard styli up to 529 mm – for measurements on deep features
- With the optional tracing driver tilting unit it is possible to manually tilt the tracing driver +/-15 degrees
SURFCOM NEX 031
- Combined roughness and contour measuring station
- Combines the advantages of the SURFCOM NEX 001 and SURFCOM NEX 031
SURFCOM NEX 041
- Combined CNC measuring station with increased precision
- Combines the advantages of the SURFCOM NEX 001 and SURFCOM NEX 041
SURFCOM NEX 100
- Universal hybrid measuring station
- The highly precise dual probe enables roughness and contour measurements in one run without exchanging the sensor
SURFCOM NEX with white light sensor
- Optical sensor for roughness measurements
- The SURFCOM NEX with white light sensor uses light to perform non-contact measurements, making the measuring machine especially suitable for sensitive surfaces
Technical Data for SURFCOM NEX
SURFCOM NEX 001
| X/C | Measuring range Z for roughness | Resolution roughness | Accuracy Z | Straightness X |
| 100/250 | max. 1000µm | min. 0.1nm | +/- 2% on 20µm periode | 0.05+L/1000µm |
| 200/250 | max. 1000µm | min. 0.1nm | +/- 2% on 20µm periode | 0.05+L/1000µm |
| 100/450 | max. 1000µm | min. 0.1nm | +/- 2% on 20µm periode | 0.05+L/1000µm |
| 200/450 | max. 1000µm | min. 0.1nm | +/- 2% on 20µm periode | 0.05+L/1000µm |
| 100/650 | max. 1000µm | min. 0.1nm | +/- 2% on 20µm periode | 0.05+L/1000µm |
| 200/650 | max. 1000µm | min. 0.1nm | +/- 2% on 20µm periode | 0.05+L/1000µm |
Optional: Measuring range Z for contour with standard stylus
SURFCOM NEX 030
|
X/C |
Measuring range Z for contour |
Resolution contour |
Accuracy Z |
Straightness X |
|
100/250 |
60mm |
0.04µm |
+/-(1.5+[2H]/100)µm |
1µm/100mm |
|
200/250 |
60mm |
0.04µm |
+/-(1.5+[2H]/100)µm |
1µm/100mm |
|
100/450 |
60mm |
0.04µm |
+/-(1.5+[2H]/100)µm |
1µm/100mm |
|
200/450 |
60mm |
0.04µm |
+/-(1.5+[2H]/100)µm |
1µm/100mm |
|
100/650 |
60mm |
0.04µm |
+/-(1.5+[2H]/100)µm |
1µm/100mm |
|
200/650 |
60mm |
0.04µm |
+/-(1.5+[2H]/100)µm |
1µm/100mm |
Optional: Measuring range Z for roughness with standard stylus
SURFCOM NEX 040
|
X/C |
Measuring range Z for contour |
Resolution contour |
Accuracy Z |
Straightness X |
|
100/250 |
60mm |
0.02µm |
+/-(0.8+[2H]/100)µm |
1µm/100mm |
|
200/250 |
60mm |
0.02µm |
+/-(0.8+[2H]/100)µm |
1µm/100mm |
|
100/450 |
60mm |
0.02µm |
+/-(0.8+[2H]/100)µm |
1µm/100mm |
|
200/450 |
60mm |
0.02µm |
+/-(0.8+[2H]/100)µm |
1µm/100mm |
|
100/650 |
60mm |
0.02µm |
+/-(0.8+[2H]/100)µm |
1µm/100mm |
|
200/650 |
60mm |
0.02µm |
+/-(0.8+[2H]/100)µm |
1µm/100mm |
Optional: Measuring range Z for roughness with standard stylus
SURFCOM NEX 031
|
X/C |
Measuring range Z for roughness |
Measuring range Z for contour |
Resolution roughness |
Resolution contour |
Accuracy Z |
Straightness X |
|
100/250 |
max. 1000µm |
60mm |
min. 0.1nm |
0.04µm |
+/-(1.5+[2H]/100)µm |
0.05+L/1000µm |
|
200/250 |
max. 1000µm |
60mm |
min. 0.1nm |
0.04µm |
+/-(1.5+[2H]/100)µm |
0.05+L/1000µm |
|
100/450 |
max. 1000µm |
60mm |
min. 0.1nm |
0.04µm |
+/-(1.5+[2H]/100)µm |
0.05+L/1000µm |
|
200/450 |
max. 1000µm |
60mm |
min. 0.1nm |
0.04µm |
+/-(1.5+[2H]/100)µm |
0.05+L/1000µm |
|
100/650 |
max. 1000µm |
60mm |
min. 0.1nm |
0.04µm |
+/-(1.5+[2H]/100)µm |
0.05+L/1000µm |
|
200/650 |
max. 1000µm |
60mm |
min. 0.1nm |
0.04µm |
+/-(1.5+[2H]/100)µm |
0.05+L/1000µm |
SURFCOM NEX 041
|
X/C |
Measuring range Z for roughness |
Measuring range Z for contour |
Resolution roughness |
Resolution contour |
Accuracy Z |
Straightness X |
|
100/250 |
max. 1000µm |
60mm |
min. 0.1nm |
0.02µm |
+/-(0.8+[2H]/100)µm |
0.05+L/1000µm |
|
200/250 |
max. 1000µm |
60mm |
min. 0.1nm |
0.02µm |
+/-(0.8+[2H]/100)µm |
0.05+L/1000µm |
|
100/450 |
max. 1000µm |
60mm |
min. 0.1nm |
0.02µm |
+/-(0.8+[2H]/100)µm |
0.05+L/1000µm |
|
200/450 |
max. 1000µm |
60mm |
min. 0.1nm |
0.02µm |
+/-(0.8+[2H]/100)µm |
0.05+L/1000µm |
|
100/650 |
max. 1000µm |
60mm |
min. 0.1nm |
0.02µm |
+/-(0.8+[2H]/100)µm |
0.05+L/1000µm |
|
200/650 |
max. 1000µm |
60mm |
min. 0.1nm |
0.02µm |
+/-(0.8+[2H]/100)µm |
0.05+L/1000µm |
SURFCOM NEX 100
|
X/C |
Measuring range Z for roughness and contour |
Resolution roughness and contour |
Resolution only contour |
Accuracy Z |
Straightness X |
|
100/250 |
5mm |
min. 0.1nm |
0.1µm |
+/-(1.0+[2H]/100)µm |
0.05+L/1000µm |
|
200/250 |
5mm |
min. 0.1nm |
0.1µm |
+/-(1.0+[2H]/100)µm |
0.05+L/1000µm |
|
100/450 |
5mm |
min. 0.1nm |
0.1µm |
+/-(1.0+[2H]/100)µm |
0.05+L/1000µm |
|
200/450 |
5mm |
min. 0.1nm |
0.1µm |
+/-(1.0+[2H]/100)µm |
0.05+L/1000µm |
|
100/650 |
5mm |
min. 0.1nm |
0.1µm |
+/-(1.0+[2H]/100)µm |
0.05+L/1000µm |
|
200/650 |
5mm |
min. 0.1nm |
0.1µm |
+/-(1.0+[2H]/100)µm |
0.05+L/1000µm |